===================BSIM4.3.0 Model Selectors/Controllers============ LEVEL SPICE3 model selector VERSION Model version BINUNIT Binning unitr PARAMCHK Switch for parameter value check MOBMOD Mobility model RDSMOD Bias-dependent source/drain resis另ance model IGCMOD Gate-to-channel tunneling current model IGBMOD Gate-to-substrate tunneling current model CAPMOD Capacitance model RGATEMOD Gate resistance model RBODYMOD Substrate resistance network model TRNQSMOD Transient NQS model ACNQSMOD AC small-signal NQS model FNOIMOD Flicker noise model TNOIMOD Thermal noise model DIOMOD Source/drain junction diode IV TEMPMOD Temperature mode selector PERMOD Whether PS/PD includes the gate-edge perimeter GEOMOD Geometry-dependent parasitics RGEOMOD Source/drain diffusion resistance and contact model =====================Process Parameters====================== EPSROX Gate dielectric constant relative to vacuum 3.9 (SiO2) TOXE Electrical gate equivalent oxide thick叩es TOXP Physical gate equivalent oxide thick叩ess TOXM Tox at which parameters are extracted DTOX Defined as (TOXE-TOXP) XJ S/D junction depth GAMMA1 (g1 in equation) Body-effect coefficient near the sur卯ace GAMMA2 (g2 in equation) Body-effect coefficient in bulk NDEP Channel doping concentration at depletion edge for zero body bias NSUB Substrate doping concentration NGATE Poly Si gate doping concentration NSD Source/drain doping concentration VBX Vbs at which the depletion region width equalsXT XT Doping depth 1.55e-7m Yes - RSH Source/drain sheet resistance RSHG Gate electrode sheet resistance =======================Basic Model Parameters========================== VTH0 or VTHO Long-channel threshold voltage at Vbs=0 0.7V (NMOS) -0.7V (PMOS) Yes Note-4 VFB Flat-band voltage -1.0V Yes Note-4 PHIN Non-uniform vertical doping effect on surface potential 0.0V Yes - K1 First-order body bias coefficient 0.5V1/2 Yes Note-5 K2 Second-order body bias coefficient 0.0 Yes Note-5 K3 Narrow width coefficient 80.0 Yes - K3B Body effect coefficient of K3 0.0 V-1 Yes - W0 Narrow width parameter 2.5e-6m Yes - LPE0 Lateral non-uniform doping parameter at Vbs=0 1.74e-7m Yes - LPEB Lateral non-uniform doping effect on K1 0.0m Yes - VBM Maximum applied body bias in VTH0 calculation -3.0V Yes - DVT0 First coefficient of short-channel effect on Vth 2.2 Yes - DVT1 Second coefficient of short-channel effect on Vth 0.53 Yes - DVT2 Body-bias coefficient of short-channel effect on Vth -0.032V-1 Yes - DVTP0 First coefficient of drain-inducedVth shift due to for long-channel pocket devices 0.0m Yes Not mod占led if binned DVTP0 <=0.0 DVTP1 First coefficient of drain-inducedVth shift due to for long-channel pocket devices 0.0V-1 Yes - DVT0W First coefficient of narrow width effect on Vth for small channel length 0.0 Yes - DVT1W Second coefficient of narrow width effect on Vth for small channel length 5.3e6m-1 Yes - DVT2W Body-bias coefficient of narrow width effect for small channel length -0.032V-1 Yes - U0 Low-field mobility 0.067 m2/(Vs) (NMOS); 0.025 m2/(Vs) PMOS Yes - UA Coefficient of first-order mobility degradation due to vertical field 1.0e-9m/V for MOBMOD =0 and 1; 1.0e-15m/V for MOBMOD =2 Yes - UB Coefficient of secon-order mobility degradation due to vertical field 1.0e-19m2/ V2 Yes - UC Coefficient of mobility degradation due to body-bias effect -0.0465V-1 for MOB仗OD=1; -0.0465e-9 m/V2 for MOBMOD =0 and 2 Yes - EU Exponent for mobility degradation of MOBMOD=2 1.67 (NMOS); 1.0 (PMOS) - VSAT Saturation velocity 8.0e4m/s Yes - A0 Coefficient of channel-length depen卡ence of bulk charge effect 1.0 Yes - AGS Coefficient of Vgs dependence of bulk charge effect 0.0V-1 Yes - B0 Bulk charge effect coefficient for channel width 0.0m Yes - B1 Bulk charge effect width offset 0.0m Yes - KETA Body-bias coefficient of bulk charge effect -0.047V-1 Yes - A1 First non-saturation effect parameter 0.0V-1 Yes - A2 Second non-saturation factor 1.0 Yes - WINT Channel-width offset parameter 0.0m No - LINT Channel-length offset parameter 0.0m No - DWG Coefficient of gate bias dependence of Weff 0.0m/V Yes - DWB Coefficient of body bias dependence of Weff bias dependence 0.0m/V1/2 Yes - VOFF Offset voltage in subthreshold region for large W and L -0.08V Yes - VOFFL Channel-length dependence of VOFF 0.0mV No - MINV Vgsteff fitting parameter for moderate inversion condition 0.0 Yes - NFACTOR Subthreshold swing factor 1.0 Yes - ETA0 DIBL coefficient in subthreshold region 0.08 Yes - ETAB Body-bias coefficient for the sub另hreshold DIBL effect -0.07V-1 Yes - DSUB DIBL coefficient exponent in sub另hreshold region DROUT Yes - CIT Interface trap capacitance 0.0F/m2 Yes - CDSC coupling capacitance between source/ drain and channel 2.4e-4F/m2 Yes - CDSCB Body-bias sensitivity of Cdsc 0.0F/(Vm2) Yes - CDSCD Drain-bias sensitivity of CDSC 0.0(F/Vm2) Yes - PCLM Channel length modulation parameter 1.3 Yes - PDIBLC1 Parameter for DIBL effect on Rout 0.39 Yes - PDIBLC2 Parameter for DIBL effect on Rout 0.0086 Yes - PDIBLCB Body bias coefficient of DIBL effect on Rout 0.0V-1 Yes - DROUT Channel-length dependence of DIBL effect on Rout 0.56 Yes - PSCBE1 First substrate current induced body-effect parameter 4.24e8V/m Yes - PSCBE2 Second substrate current induced body-effect parameter 1.0e-5m/V Yes - PVAG Gate-bias dependence of Early volt仟ge 0.0 Yes - DELTA (d in equation) Parameter for DC Vdseff 0.01V Yes - FPROUT Effect of pocket implant on Rout deg叵adation 0.0V/m0.5 Yes Not mod占led if binned FPROUT not posi另ive PDITS Impact of drain-induced Vth shift on Rout 0.0V-1 Yes Not mod占led if binned PDITS=0; Fatal error if binned PDITS negative PDITSL Channel-length dependence of drain-induced Vth shift for Rout 0.0m-1 No Fatal error if PDITSL negative PDITSD Vds dependence of drain-induced Vth shift for Rout 0.0V-1 Yes - LAMBDA Velocity overshoot coefficient 0.0 Yes If not given or (<=0.0), velocity overshoot will be turned off VTL Thermal velocity 2.05e5[m/s] Yes If not given or (<=0.0), source end thermal velocity will be turned off LC Velocity back scattering coefficient 0.0[m] No 5e9[m] at room tem叼erature XN Velocity back scattering coefficient 3.0 Yes - ================Parameters for Asymmetric and Bias-Dependent Rds Model================== RDSW Zero bias LDD resistance per unit width for RDSMOD=0 200.0 ohm(mm)WR Yes If negative, reset to 0.0 RDSWMIN LDD resistance per unit width at high Vgs and zero Vbs for RDSMOD=0 0.0 ohm(mm)WR No - RDW Zero bias lightly-doped drain resis另ance Rd(V) per unit width for RDS仗OD=1 100.0 ohm(mm)WR Yes - RDWMIN Lightly-doped drain resistance per unit width at high Vgs and zero Vbs for RDSMOD=1 0.0 ohm(mm)WR No - RSW Zero bias lightly-doped source resis另ance Rs(V) per unit width for RDS仗OD=1 100.0 ohm(mm)WR Yes - RSWMIN Lightly-doped source resistance per unit width at high Vgs and zero Vbs for RDSMOD=1 0.0 ohm(mm)WR No - PRWG Gate-bias dependence of LDD resis另ance 1.0V-1 Yes - PRWB Body-bias dependence of LDD resis另ance 0.0V-0.5 Yes - WR Channel-width dependence parameter of LDD resistance 1.0 Yes - NRS Number of source diffusion squares 1.0 No - NRD Number of drain diffusion squares 1.0 No - ==================Impact Ionization Current Model Parameters================== ALPHA0 First parameter of impact ionization current 0.0Am/V Yes - ALPHA1 Isub parameter for length scaling 0.0A/V Yes - BETA0 The second parameter of impact ion可zation current 30.0V Yes - ===================Gate-Induced Drain Leakage Model Parameters=================== AGIDL Pre-exponential coefficient for GIDL 0.0mho Yes Igidl=0.0 if binned AGIDL =0.0 BGIDL Exponential coefficient for GIDL 2.3e9V/m Yes Igidl=0.0 if binned BGIDL =0.0 CGIDL Paramter for body-bias effect on GIDL 0.5V3 Yes - EGIDL Fitting parameter for band bending for GIDL 0.8V Yes - ===================Gate Dielectric Tunneling Current Model Parameters ============= AIGBACC Parameter for Igb in accumulation 0.43 (Fs2/g)0.5m-1 Yes - BIGBACC Parameter for Igb in accumulation 0.054 (Fs2/g)0.5 m-1V-1 Yes - CIGBACC Parameter for Igb in accumulation 0.075V-1 Yes - NIGBACC Parameter for Igb in accumulation 1.0 Yes Fatal error if binned value not positive AIGBINV Parameter for Igb in inversion 0.35 (Fs2/g)0.5m-1 Yes - BIGBINV Parameter for Igb in inversion 0.03 (Fs2/g)0.5 m-1V-1 Yes - CIGBINV Parameter for Igb in inversion 0.006V-1 Yes - EIGBINV Parameter for Igb in inversion 1.1V Yes - NIGBINV Parameter for Igb in inversion 3.0 Yes Fatal error if binned value not positive AIGC Parameter for Igcs and Igcd 0.054 (NMOS) and 0.31 (PMOS) (Fs2/g)0.5m-1 Yes - BIGC Parameter for Igcs and Igcd 0.054 (NMOS) and 0.024 (PMOS) (Fs2/g)0.5 m-1V-1 Yes - CIGC Parameter for Igcs and Igcd 0.075 (NMOS) and 0.03 (PMOS) V-1 Yes - AIGSD Parameter for Igs and Igd 0.43 (NMOS) and 0.31 (PMOS) (Fs2/g)0.5m-1 Yes - BIGSD Parameter for Igs and Igd 0.054 (NMOS) and 0.024 (PMOS) (Fs2/g)0.5 m-1V-1 Yes - CIGSD Parameter for Igs and Igd 0.075 (NMOS) and 0.03 (PMOS) V-1 Yes - DLCIG Source/drain overlap length for Igs and Igd LINT Yes - NIGC Parameter for Igcs, Igcd ,Igs and Igd 1.0 Yes Fatal error if binned value not positive POXEDGE Factor for the gate oxide thickness in source/drain overlap regions 1.0 Yes Fatal error if binned value not positive PIGCD Vds dependence of Igcs and Igcd 1.0 Yes Fatal error if binned value not positive NTOX Exponent for the gate oxide ratio 1.0 Yes - TOXREF Nominal gate oxide thickness for gate dielectric tunneling current model only 3.0e-9m No Fatal error if not posi另ive =============Charge and Capacitance Model Parameters======================== XPART Charge partition parameter 0.0 No - CGSO Non LDD region source-gate overlap capacitance per unit channel width calculated (F/m) No Note-6 CGDO Non LDD region drain-gate overlap capacitance per unit channel width calculated (F/m) No Note-6 CGBO Gate-bulk overlap capacitance per unit channel length 0.0 F/m Note-6 CGSL Overlap capacitance between gate and lightly-doped source region 0.0F/m Yes - CGDL Overlap capacitance between gate and lightly-doped source region 0.0F/m Yes - CKAPPAS Coefficient of bias-dependent overlap capacitance for the source side 0.6V Yes - CKAPPAD Coefficient of bias-dependent overlap capacitance for the drain side CKAPPAS Yes - CF Fringing field capacitance calculated (F/m) Yes Note-7 CLC Constant term for the short channel model 1.0e-7m Yes - CLE Exponential term for the short channel model 0.6 Yes - DLC Channel-length offset parameter for CV model LINT (m) No - DWC Channel-width offset parameter for CV model WINT (m) No - VFBCV Flat-band voltage parameter (for CAPMOD=0 only) -1.0V Yes - NOFF CV parameter inVgsteff,CV for weak to strong inversion 1.0 Yes - VOFFCV CV parameter inVgsteff,CV for week to strong inversion 0.0V Yes - ACDE Exponential coefficient for charge thickness in CAPMOD=2 for accumu召ation and depletion regions 1.0m/V Yes - MOIN Coefficient for the gate-bias depen卡ent surface potential 15.0 Yes - =======================High-Speed/RF Model Parameters======================== XRCRG1 Parameter for distributed channel-resistance effect for both intrinsic-input resistance and charge-deficit NQS models 12.0 Yes Warning message issued if binned XRCRG1 <=0.0 XRCRG2 Parameter to account for the excess channel diffusion resistance for both intrinsic input resistance and charge-deficit NQS models 1.0 Yes - RBPB Resistance connected between bNodePrime and bNode 50.0ohm No If less than 1.0e-3ohm, reset to 1.0e-3ohm RBPD Resistance connected between bNodePrime and dbNode 50.0ohm No If less than 1.0e-3ohm, reset to 1.0e-3ohm RBPS Resistance connected between bNodePrime and sbNode 50.0ohm No If less than 1.0e-3ohm, reset to 1.0e-3ohm RBDB Resistance connected between dbNode and bNode 50.0ohm No If less than 1.0e-3ohm, reset to 1.0e-3ohm RBSB Resistance connected between sbNode and bNode 50.0ohm No If less than 1.0e-3ohm, reset to 1.0e-3ohm GBMIN Conductance in parallel with each of the five substrate resistances to avoid potential nuge issued if less than 1.0e-20 mho =====================Flicker and Thermal Noise Model Parameters======================== NOIA Flicker noise parameter A 6.25e41 (eV)-1s1乍Fm-3 for NMOS; 6.188e40 (eV)-1s1乍Fm-3 for PMOS No - NOIB Flicker noise parameter B 3.125e26 (eV)-1s1乍Fm-1 for NMOS; 1.5e25 (eV)-1s1乍Fm-1 for PMOS No - NOIC Flicker noise parameter C 8.75 (eV)-1s1-EFm No - EM Saturation field 4.1e7V/m No - AF Flicker noise exponent 1.0 No - EF Flicker noise frequency exponent 1.0 No - KF Flicker noise coefficient 0.0 A2-EFs1-EF F No - NTNOI Noise factor for short-channel devices for TNOIMOD=0 only 1.0 No - TNOIA Coefficient of channel-length depen卡ence of total channel thermal noise 1.5E6 No - TNOIB Channel-length dependence parameter for channel thermal noise partitioning 3.5E6 No - RNOIA Thermal Noise Coefficient 0.577 No - RNOIB Thermal Noise Coefficient 0.37 No - =======================Layout-Dependent Parasitics Model Parameters=================== DMCG Distance from S/D contact center to the gate edge 0.0m No - DMCI Distance from S/D contact center to the isolation edge in the channel-length direction DMCG No - DMDG Same as DMCG but for merged device only 0.0m No - DMCGT DMCG of test structures 0.0m No - NF Number of device fingers 1 No Fatal error if less than one DWJ Offset of the S/D junction width DWC (in CVmodel) No - MIN Whether to minimize the number of drain or source diffusions for even-number fingered device 0 (minimize the drain dif卯usion num半er) No - XGW Distance from the gate contact to the channel edge 0.0m No - XGL Offset of the gate length due to varia另ions in patterning 0.0m No - XL Channel length offset due to mask/ etch effect 0.0m No - XW Channel width offset due to mask/etch effect 0.0m No - NGCON Number of gate contacts 1 No Fatal error if less than one; if not equal to 1 or 2, warn可ng mes叫age issued and reset to 1 =======================Asymmetric Source/Drain Junction Diode Model Parameters===================== IJTHSREV Limiting current in reverse bias region IJTHSREV =0.1A IJTHDREV =IJTHSREV No If not posi另ive, reset to 0.1A IJTHSFWD Limiting current in forward bias region IJTHSFWD =0.1A IJTHDFWD =IJTHS乏WD No If not posi另ive, reset to 0.1A XJBVS Fitting parameter for diode break卡own XJBVS=1.0 XJBVD =XJBVS No Note-8 BVS Breakdown voltage BVS=10.0V BVD=BVS No If not posi另ive, reset to 10.0V JSS Bottom junction reverse saturation current density JSS= 1.0e-4A/m2 JSD=JSS No - JSWS Isolation-edge sidewall reverse satura另ion current density JSWS =0.0A/m JSWD =JSWS No - JSWGS Gate-edge sidewall reverse saturation current density JSWGS =0.0A/m JSWGD =JSWGS No - CJS Bottom junction capacitance per unit area at zero bias CJS=5.0e-4 F/m2 CJD=CJS No - MJS Bottom junction capacitance grating coefficient MJS=0.5 MJD=MJS No - MJSWS Isolation-edge sidewall junction capacitance grading coefficient MJSWS =0.33 MJSWD =MJSWS No - CJSWS Isolation-edge sidewall junction capacitance per unit area CJSWS= 5.0e-10 F/m CJSWD =CJSWS No - CJSWGS Gate-edge sidewall junction capaci另ance per unit length CJSWGS =CJSWS CJSWGD =CJSWS No - MJSWGS Gate-edge sidewall junction capaci另ance grading coefficient MJSWGS =MJSWS MJSWGD =MJSWS No - PB Bottom junction built-in potential PBS=1.0V PBD=PBS No - PBSWS Isolation-edge sidewall junction built-in potential PBSWS =1.0V PBSWD =PBSWS No - PBSWGS Gate-edge sidewall junction built-in potential PBSWGS =PBSWS PBSWGD =PBSWS No - IJTHDREV Limiting current in reverse bias region IJTHSREV =0.1A IJTHDREV =IJTHSREV No If not posi另ive, reset to 0.1A IJTHDFWD Limiting current in forward bias region IJTHSFWD =0.1A IJTHDFWD =IJTHS乏WD No If not posi另ive, reset to 0.1A XJBVD Fitting parameter for diode break卡own XJBVS=1.0 XJBVD =XJBVS No Note-8 BVD Breakdown voltage BVS=10.0V BVD=BVS No If not posi另ive, reset to 10.0V JSD Bottom junction reverse saturation current density JSS= 1.0e-4A/m2 JSD=JSS No - JSWD Isolation-edge sidewall reverse satura另ion current density JSWS =0.0A/m JSWD =JSWS No - JSWGD Gate-edge sidewall reverse saturation current density JSWGS =0.0A/m JSWGD =JSWGS No - CJD Bottom junction capacitance per unit area at zero bias CJS=5.0e-4 F/m2 CJD=CJS No - MJD Bottom junction capacitance grating coefficient MJS=0.5 MJD=MJS No - MJSWD Isolation-edge sidewall junction capacitance grading coefficient MJSWS =0.33 MJSWD =MJSWS No - CJSWD Isolation-edge sidewall junction capacitance per unit area CJSWS= 5.0e-10 F/m CJSWD =CJSWS No - CJSWGD Gate-edge sidewall junction capaci另ance per unit length CJSWGS =CJSWS CJSWGD =CJSWS No - MJSWGD Gate-edge sidewall junction capaci另ance grading coefficient MJSWGS =MJSWS MJSWGD =MJSWS No - PBSWD Isolation-edge sidewall junction built-in potential PBSWS =1.0V PBSWD =PBSWS No - PBSWGD Gate-edge sidewall junction built-in potential PBSWGS =PBSWS PBSWGD =PBSWS No - =======================Temperature Dependence Parameters===================================== TNOM Temperature at which parameters are extracted 27oC No - UTE Mobility temperature exponent -1.5 Yes - KT1 Temperature coefficient for threshold voltage -0.11V Yes - KT1L Channel length dependence of the temperature coefficient for threshold voltage 0.0Vm Yes - KT2 Body-bias coefficient of Vth tempera另ure effect 0.022 Yes - UA1 Temperature coefficient for UA 1.0e-9m/V Yes - UB1 Temperature coefficient for UB -1.0e-18 (m/V)2 Yes - UC1 Temperature coefficient for UC 0.056V-1 for MOB仗OD=1; 0.056e-9m/ V2 for MOB仗OD=0 and 2 Yes - AT Temperature coefficient for satura另ion velocity 3.3e4m/s Yes - PRT Temperature coefficient for Rdsw 0.0ohm-m Yes - NJS Emission coefficients of junction for source and drain junctions, respec另ively NJS=1.0; NJD=NJS No - XTIS Junction current temperature expo叩ents for source and drain junctions, respectively XTIS=3.0; XTID=XTIS No - NJD Emission coefficients of junction for source and drain junctions, respec另ively NJS=1.0; NJD=NJS No - XTID Junction current temperature expo叩ents for source and drain junctions, respectively XTIS=3.0; XTID=XTIS No - TPB Temperature coefficient of PB 0.0V/K No - TPBSW Temperature coefficient of PBSW 0.0V/K No - TPBSWG Temperature coefficient of PBSWG 0.0V/K No - TCJ Temperature coefficient of CJ 0.0K-1 No - TCJSW Temperature coefficient of CJSW 0.0K-1 No - TCJSWG Temperature coefficient of CJSWG 0.0K-1 No - =====================Stress Effect Model Parameters==================================== SA Distance between OD edge to Poly from one side 0.0 If not given or(<=0), stress effect will be turned off SB Distance between OD edge to Poly from other side 0.0 If not given or(<=0), stress effect will be turned off SD Distance between neighbouring fin卮ers 0.0 For NF>1 :If not given or(<=0), stress effect will be turned off SAref Reference distance between OD and edge to poly of one side 1E-06[m] No >0.0 SBref Reference distance between OD and edge to poly of the other side 1E-06[m] No >0.0 WLOD Width parameter for stress effect 0.0[m] No - KU0 Mobility degradation/enhancement coefficient for stress effect 0.0[m] No - KVSAT Saturation velocity degradation/ enhancement parameter for stress effect 0.0[m] No -1<=kvsat< =1 TKU0 Temperature coefficient of KU0 0.0 No - LKU0 Length dependence of ku0 0.0 No - WKU0 Width dependence of ku0 0.0 No - LLODKU0 Length parameter for u0 stress effect 0.0 No >0 WLODKU0 Width parameter for u0 stress effect 0.0 No >0 KVTH0 Threshold shift parameter for stress effect 0.0[Vm] No - LKVTH0 Length dependence of kvth0 0.0 No - WKVTH0 Width dependence of kvth0 0.0 No - PKVTH0 Cross-term dependence of kvth0 0.0 No - LLODVTH Length parameter for Vth stress effect 0.0 No >0 WLODVTH Width parameter for Vth stress effect 0.0 No >0 STK2 K2 shift factor related to Vth0 change 0.0[m] No LODK2 K2 shift modification factor for stress effect 1.0 No >0 STETA0 eta0 shift factor related to Vth0 change 0.0[m] No LODETA0 eta0 shift modification factor for stress effect 1.0 No >0 ===================dW and dL Parameters===================== WL Coefficient of length dependence for width offset 0.0mWLN No - WLN Power of length dependence of width offset 1.0 No - WW Coefficient of width dependence for width offset 0.0mWWN No - WWN Power of width dependence of width offset 1.0 No - WWL Coefficient of length and width cross term dependence for width offset 0.0 mWWN+WLN No - LL Coefficient of length dependence for length offset 0.0mLLN No - LLN Power of length dependence for length offset 1.0 No - LW Coefficient of width dependence for length offset 0.0mLWN No - LWN Power of width dependence for length offset 1.0 No - LWL Coefficient of length and width cross term dependence for length offset 0.0 mLWN+LLN No - LLC Coefficient of length dependence for CV channel length offset LL No - LWC Coefficient of width dependence for CV channel length offset LW No - LWLC Coefficient of length and width cross-term dependence for CV channel length offset LWL No - WLC Coefficient of length dependence for CV channel width offset WL No - WWC Coefficient of width dependence for CV channel width offset WW No - WWLC Coefficient of length and width cross-term dependence for CV channel width offset WWL No - ===================Range Parameters for Model Application========================= LMIN Minimum channel length 0.0m No - LMAX Maximum channel length 1.0m No - WMIN Minimum channel width 0.0m No - WMAX Maximum channel width 1.0m No -